Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667189 | High performance silicon condenser microphone with perforated single crystal silicon backplate | Zhe Wang, Hanhua Feng | 2003-12-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667189 | High performance silicon condenser microphone with perforated single crystal silicon backplate | Zhe Wang, Hanhua Feng | 2003-12-23 |