Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6567715 | Method and system for automated on-chip material and structural certification of MEMS devices | Michael B. Sinclair, Maarten P. DeBoer, Brian D. Jensen, Samuel Lee Miller | 2003-05-20 |