Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657196 | Method and apparatus for environmental monitoring | Michiaki Endo, Yasuhiro Maeda | 2003-12-02 |
| 6590479 | Integrated microcontact pin and method for manufacturing the same | Yasuhiro Maeda, Yoshihide Miyagawa | 2003-07-08 |
| 6545279 | Surface state monitoring method and apparatus | Michiaki Endo | 2003-04-08 |
| 6508990 | Substrate treating method and apparatus | Michiaki Endo, Michio Niwano, Nobuo Miyamoto, Yasuhiro Maeda | 2003-01-21 |