Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544482 | Chamber cleaning mechanism | — | 2003-04-08 |
| 6511641 | Method for abatement of gaseous pollutants | Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Daniel O. Clark, Belynda Flippo +3 more | 2003-01-28 |