Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579420 | Apparatus and method for uniformly depositing thin films over substrates | Zhimin Wan, Peiching Ling, Jianmin Qiao | 2003-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579420 | Apparatus and method for uniformly depositing thin films over substrates | Zhimin Wan, Peiching Ling, Jianmin Qiao | 2003-06-17 |