Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621581 | Method and apparatus for mapping surface topography of a substrate | James D. Hunt, Charles A. Monjak | 2003-09-16 |
| 6509965 | Wafer inspection system for distinguishing pits and particles | Michael E. Fossey, John C. Stover | 2003-01-21 |