Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540930 | Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases | Susrut Kesari, Fred E. Behr, Michael G. Costello, Richard M. Flynn, John G. Owens +2 more | 2003-04-01 |