Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498870 | Micromachined optomechanical switches | Ming Chieh Wu, Li Fan | 2002-12-24 |
| 6453083 | Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring | Li Fan | 2002-09-17 |
| 6449406 | Micromachined optomechanical switching devices | Li Fan | 2002-09-10 |
| 6445840 | Micromachined optical switching devices | Marc Fernandez, Li Fan | 2002-09-03 |
| 6445841 | Optomechanical matrix switches including collimator arrays | Steffen Gloeckner, Li Fan | 2002-09-03 |