Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492270 | Method for forming copper dual damascene | — | 2002-12-10 |
| 6468858 | Method of forming a metal insulator metal capacitor structure | — | 2002-10-22 |
| 6451650 | Low thermal budget method for forming MIM capacitor | — | 2002-09-17 |
| 6440847 | Method for forming a via and interconnect in dual damascene | — | 2002-08-27 |
| 6432794 | Process for fabricating capacitor | — | 2002-08-13 |
| 6417066 | Method of forming a DRAM capacitor structure including increasing the surface area using a discrete silicon mask | — | 2002-07-09 |
| 6413856 | Method of fabricating dual damascene structure | — | 2002-07-02 |
| 6403486 | Method for forming a shallow trench isolation | — | 2002-06-11 |
| 6403471 | Method of forming a dual damascene structure including smoothing the top part of a via | — | 2002-06-11 |
| 6399482 | Method and structure for a conductive and a dielectric layer | — | 2002-06-04 |
| 6376326 | Method of manufacturing DRAM capacitor | — | 2002-04-23 |
| 6372653 | Method of forming dual damascene structure | Su-Yuan Chang | 2002-04-16 |
| 6358845 | Method for forming inter metal dielectric | — | 2002-03-19 |