Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365015 | Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gaps | Jessie C. Shan, Steve H. Y. Yang | 2002-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365015 | Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gaps | Jessie C. Shan, Steve H. Y. Yang | 2002-04-02 |