Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500737 | System and method for providing defect free rapid thermal processing | — | 2002-12-31 |
| 6500264 | Continuous thermal evaporation system | — | 2002-12-31 |
| 6410455 | Wafer processing system | Hiromitsu Kuribayashi | 2002-06-25 |
| 6394523 | Portable enclosure for semiconductor processing | Taro Yamazaki | 2002-05-28 |
| 6395648 | Wafer processing system | — | 2002-05-28 |
| 6379073 | Adjustable joint for a positionable arm | Hiromitsu Kuribayashi | 2002-04-30 |
| 6376806 | Flash anneal | — | 2002-04-23 |
| 6349546 | Liquid gas exchanger | — | 2002-02-26 |
| 6345150 | Single wafer annealing oven | — | 2002-02-05 |