Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458688 | Semiconductor wafer with improved flatness, and process for producing the semiconductor wafer | Guido Wenski, Thomas Altmann, Ernst Feuchtinger, Wolfgang Winkler, Gerhard Heier | 2002-10-01 |