Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451124 | Process for the chemical treatment of semiconductor wafers | — | 2002-09-17 |
| 6412500 | Device and method for cleaning semiconductor wafers | Franz Sollinger, Hans-Joachim Luthe, Georg-Friedrich Hohl | 2002-07-02 |