Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416393 | Process for producing a semiconductor wafer | Laszlo Fabry, Gabriele Lechner, Anton Schnegg | 2002-07-09 |
| 6362487 | Method and device for nondestructive detection of crystal defects | Michael Kerstan, Holger Lundt, Dieter Helmreich | 2002-03-26 |