Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413860 | PECVD of Ta films from tanatalum halide precursors | Johannes F. M. Westendorp | 2002-07-02 |
| 6410432 | CVD of integrated Ta and TaNx films from tantalum halide precursors | Johannes F. M. Westendorp | 2002-06-25 |
| 6410433 | Thermal CVD of TaN films from tantalum halide precursors | Johannes F. M. Westendorp | 2002-06-25 |