Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437350 | Methods and apparatus for adjusting beam parallelism in ion implanters | Joseph C. Olson | 2002-08-20 |
| 6403972 | Methods and apparatus for alignment of ion beam systems using beam current sensors | Antonella Cucchetti, Leo V. Klos, Joseph C. Olson, Raymond L. Pelletier, Keith Pierce +1 more | 2002-06-11 |