Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498349 | Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy | Clarence E. Thomas, Larry R. Baylor, Edgar Voelkl, Michael L. Simpson, Michael J. Paulus +3 more | 2002-12-24 |