Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486068 | Method for manufacturing group III nitride compound semiconductor laser diodes | Shiro Yamasaki, Seiji Nagai, Masayoshi Koike, Isamu Akasaki, Hiroshi Amano +1 more | 2002-11-26 |
| 6486478 | Gas cluster ion beam smoother apparatus | Bruce K. Libby, James A. Greer, Lester G. Crawford, James G. Bachand, Matthew C. Gwinn +1 more | 2002-11-26 |
| 6416820 | Method for forming carbonaceous hard film | Jiro Matsuo, Teruyuki Kitagawa, Allen R. Kirkpatrick | 2002-07-09 |