Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472299 | Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 K | Chiharu Miyata, Toshiyuki Takamatsu | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472299 | Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 K | Chiharu Miyata, Toshiyuki Takamatsu | 2002-10-29 |