Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391217 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Ullrich Steiner, Thomas Thurn-Albrecht, Thomas P. Russell | 2002-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391217 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Ullrich Steiner, Thomas Thurn-Albrecht, Thomas P. Russell | 2002-05-21 |