Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401728 | Method for cleaning interior of etching chamber | W. H. Cheng, Chia-Fu Yeh, C.M. CHI, Cobby Lee | 2002-06-11 |
| 6374832 | Waferless seasoning process | Wen-Hua Cheng, Hung-Chen Yu, Chih-Ming Chi | 2002-04-23 |