Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6427470 | Cooling system for reducing particles pollution | Eric Chu, Kevin Chiang, Ken Yew | 2002-08-06 |
| 6334404 | Method and apparatus for reducing particle contamination on wafers | Tien-Jui Liu | 2002-01-01 |