Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368910 | Method of fabricating ruthenium-based contact plug for memory devices | Bor-Bu Sheu, Chung-Ming Chu, Ming-Chung Chiang, Min-Chieh Yang, Wen-Chung Liu +1 more | 2002-04-09 |