Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465360 | Method for fabricating an ultra small opening | Tzung-Han Lee, Kun-Chi Lin | 2002-10-15 |
| 6361928 | Method of defining a mask pattern for a photoresist layer in semiconductor fabrication | Tzung-Han Lee | 2002-03-26 |