Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429135 | Method of reducing stress between a nitride silicon spacer and a substrate | Kun-Chi Lin | 2002-08-06 |
| 6403411 | Method for manufacturing lower electrode of DRAM capacitor | Chih-Hsun Chu, Kevin Lin, Kuo-Tai Huang, Wen-Yi Hsieh, Tri-Rung Yew | 2002-06-11 |