Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368882 | Method for detecting organic contamination by using hemispherical-grain polysilicon layer | Leon Chang | 2002-04-09 |
| 6365524 | Method for making a concave bottom oxide within a trench | Chung Y. Chen, Jerry C. S. Lin, Yen-Rong Chang | 2002-04-02 |
| 6358864 | Method of fabricating an oxide/nitride multilayer structure for IC manufacture | Yi-Shin Chang, Ming-Kuan Kao, Yi-Fu Chang | 2002-03-19 |