Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479821 | Thermally induced phase switch for laser thermal processing | Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson | 2002-11-12 |
| 6441514 | Magnetically positioned X-Y stage having six degrees of freedom | — | 2002-08-27 |
| 6381077 | Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrate | Hwan J. Jeong | 2002-04-30 |