Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6408860 | Method for cleaning phosphorus from an MBE chamber | Patrick Chin, Todd K. Makishi | 2002-06-25 |
| 6365478 | Solid state electronic device fabrication using crystalline defect control | Michael Wojtowitz, Abdullah Cavus | 2002-04-02 |