Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420251 | Method for fabricating a microelectronic integrated circuit with improved step coverage | Raffi N. Elmadjian | 2002-07-16 |
| 6384423 | Process for reducing surface roughness of superconductor integrated circuit having a ground plane of niobium nitride of improved smoothness | Michael Leung | 2002-05-07 |