Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352593 | Mini-batch process chamber | Robert C. Cook | 2002-03-05 |
| 6352594 | Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors | Robert C. Cook | 2002-03-05 |