Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462361 | GaInP epitaxial stacking structure and fabrication method thereof, and a FET transistor using this structure | Takashi Udagawa, Akira Kasahara, Taichi Okano | 2002-10-08 |
| 6401353 | Substrate dryer | — | 2002-06-11 |
| 6368720 | Formable biaxially-oriented polyester film | Ryousuke Matsui, Kohzo Takahashi | 2002-04-09 |
| 6365659 | Polyester composition and film, and production method | Masatoshi Aoyama, Keisuke Honda, Kenichi Tsutsumi | 2002-04-02 |
| 6354311 | Substrate drying apparatus and substrate processing apparatus | Hiroyuki Araki | 2002-03-12 |