Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455228 | Multilayered body for photolithographic patterning | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2002-09-24 |
| 6416930 | Composition for lithographic anti-reflection coating, and resist laminate using the same | Kazumasa Wakiya, Shigeru Yokoi, Masakazu Kobayashi | 2002-07-09 |
| 6406829 | Negative-working photoresist composition | Toshikazu Tachikawa, Fumitake Kaneko, Miwa Miyairi, Takako Hirosaki, Koutaro Endo | 2002-06-18 |