Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485887 | Positive-working photoresist composition | Hiroto Yukawa, Akiyoshi Yamazaki, Kazuo Tani, Yohei Kinoshita, Tomotaka Yamada | 2002-11-26 |
| 6387587 | Positive-working chemical-amplification photoresist composition | Hiroto Yukawa, Ryusuke Uchida, Kazufumi Sato | 2002-05-14 |
| 6340553 | Positive-working photoresist composition | Hiroto Yukawa, Akiyoshi Yamazaki, Kazuo Tani, Yohei Kinoshita, Tomotaka Yamada | 2002-01-22 |