Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495215 | Method and apparatus for processing substrate | — | 2002-12-17 |
| 6491045 | Apparatus for and method of cleaning object to be processed | Kinya Ueno, Satoshi Nakashima | 2002-12-10 |
| 6435199 | Treatment apparatus | — | 2002-08-20 |
| 6413355 | Apparatus for and method of cleaning objects to be processed | Satoshi Nakashima, Kinya Ueno | 2002-07-02 |
| 6394110 | Substrate processing apparatus and substrate processing method | Shigenori Kitahara, Kinya Ueno | 2002-05-28 |
| 6375758 | Cleaning and drying method and apparatus for objects to be processed | Satoshi Nakashima, Kazuyuki Honda | 2002-04-23 |
| 6357458 | Cleaning apparatus and cleaning method | Hiroshi Tanaka, Shinichiro Shimomura | 2002-03-19 |
| 6342104 | Method of cleaning objects to be processed | Satoshi Nakashima, Kinya Ueno | 2002-01-29 |