YA

Yasushi Aiba

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #89,069 of 266,432Top 35%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6387445 Tungsten layer forming method and laminate structure of tungsten layer Yukio Koike 2002-05-14