Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491742 | ESRF coolant degassing process | — | 2002-12-10 |
| 6425953 | All-surface biasable and/or temperature-controlled electrostatically-shielded RF plasma source | — | 2002-07-30 |
| 6422825 | Plasma vacuum pumping cell | Raphael A. Dandl, Gareth Guest | 2002-07-23 |
| 6392187 | Apparatus and method for utilizing a plasma density gradient to produce a flow of particles | — | 2002-05-21 |
| 6385977 | ESRF chamber cooling system and process | — | 2002-05-14 |
| 6351683 | System and method for monitoring and controlling gas plasma processes | Richard Parsons | 2002-02-26 |
| 6339206 | Apparatus and method for adjusting density distribution of a plasma | — | 2002-01-15 |