Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428661 | Plating apparatus | — | 2002-08-06 |
| 6372084 | Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate | Tetsu Osawa | 2002-04-16 |