MD

Masatoshi Deguchi

TL Tokyo Electron Limited: 2 patents #58 of 413Top 15%
Overall (2002): #52,697 of 266,432Top 20%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6473151 Substrate processing apparatus 2002-10-29
6466300 Substrate processing apparatus 2002-10-15