Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457882 | Substrate processing method and substrate processing apparatus | Kunie Ogata, Ryouichi Uemura, Yoshiyuki Nakajima | 2002-10-01 |
| 6394670 | Parts maintenance managing system | Kunie Ogata, Takashi Aiuchi | 2002-05-28 |