KO

Kouji Okamura

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
📍 Tochigi, JP: #84 of 306 inventorsTop 30%
Overall (2002): #171,706 of 266,432Top 65%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6461986 Substrate processing method apparatus and substrate carrying method Hiroharu Hashiguchi 2002-10-08