Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383333 | Protective member for inner surface of chamber and plasma processing apparatus | Kazuyoshi Haino | 2002-05-07 |
| 6334983 | Processing system | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa, Daisuke Hayashi, Naoki Takayama | 2002-01-01 |