Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413317 | Substrate processing method and substrate processing apparatus | Yuichiro Uchihama, Kenji Yasuda, Kiminari Sakaguchi, Shinji Nagashima | 2002-07-02 |
| 6354832 | Substrate processing apparatus and substrate processing method | Yuta Yoshimura, Kyoshige Katayama, Takeshi Tamura | 2002-03-12 |