Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499367 | Device and method for detecting substrate | — | 2002-12-31 |
| 6466835 | Deadlock avoidance method and treatment system for object to be treated | Shigeru Ishizawa | 2002-10-15 |
| 6450757 | Conveyor system | Keisuke Kondoh | 2002-09-17 |
| 6338626 | Load-lock mechanism and processing apparatus | — | 2002-01-15 |