CT

Chihiro Taguchi

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
📍 Kofu, JP: #13 of 32 inventorsTop 45%
Overall (2002): #240,111 of 266,432Top 95%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6492612 Plasma apparatus and lower electrode thereof Ryo Nonaka 2002-12-10