Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433878 | Method and apparatus for the determination of mask rules using scatterometry | Nickhil Jakatdar | 2002-08-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433878 | Method and apparatus for the determination of mask rules using scatterometry | Nickhil Jakatdar | 2002-08-13 |