Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470754 | Sealed capacitive pressure sensors | — | 2002-10-29 |
| 6460234 | Method of forming micromachined sealed capacitive pressure sensors | — | 2002-10-08 |
| 6377718 | Micromechanical phase-shifting gate optical modulator | Long Que, Gunawan Witjaksono | 2002-04-23 |