Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490147 | High-Q micromechanical device and method of tuning same | Jun-Bo Yoon | 2002-12-03 |
| 6424074 | Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device | — | 2002-07-23 |