Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6396900 | Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application | Sasa Bajt | 2002-05-28 |
| 6380627 | Low resistance barrier layer for isolating, adhering, and passivating copper metal in semiconductor fabrication | Timothy P. Weihs | 2002-04-30 |
| 6339020 | Method for forming a barrier layer | Timothy P. Weihs | 2002-01-15 |