Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440637 | Electron beam lithography method forming nanocrystal shadowmasks and nanometer etch masks | Sung Hun Choi, Martin S. Leung, Gary W. Stupian | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440637 | Electron beam lithography method forming nanocrystal shadowmasks and nanometer etch masks | Sung Hun Choi, Martin S. Leung, Gary W. Stupian | 2002-08-27 |