Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488037 | Programmable physical action during integrated circuit wafer cleanup | — | 2002-12-03 |
| 6448154 | Method for producing wafers with rounded corners in the notches used for alignment in the fabrication of semiconductor devices | James Garvin, Moitreyee Mukerjee-Roy | 2002-09-10 |
| 6442867 | Apparatus and method for cleaning a vertical furnace pedestal and cap | William Pressnall, Frank Poag | 2002-09-03 |
| 6420792 | Semiconductor wafer edge marking | Keith Melcher, John P. Williston | 2002-07-16 |
| 6395102 | Method and apparatus for in-situ reticle cleaning at photolithography tool | Sima Salamati-Saradh, David R. Wyke | 2002-05-28 |